Patent Information for ZYGO Products

Zygo’s intellectual property is protected by international patents and the U.S. patents listed below.

Optical
Profilers

US 7,106,454
US 7,271,918
US 7,298,494
US 7,304,747
US 7,321,430
US 7,321,431
US 7,324,210
US 7,428,057
US 7,446,882
US 7,456,975
US 7,468,799
US 7,522,288
US 7,564,566
US 7,586,620
US 7,616,323
US 7,619,746
US 7,933,025
US 7,948,637
US 8,045,175
US 8,107,085
US 8,126,677
US 8,698,891
US 8,780,334
US 9,541,381
US 9,599,534
US 9,658,129
US 9,719,777
US 9,798,130
US 9,958,254
US 10,451,413
US 10,591,284

Laser
Interferometers

 US 7,612,893
US 7,710,580
US 7,796,273
US 7,948,638
US 7,948,639
US 9,103,649
US 9,234,739
US 9,435,640
US 10,267,617
US 10,890,428
US 10,962,348
US 11,841,548
US 11,966,041

Displacement Position Sensors

US 7,542,147
US 7,548,322
US 7,576,868
US 7,636,166
US 7,639,367
US 7,826,064
US 8,300,233
US 8,670,127
US 8,885,172
US 8,913,226
US 8,988,690
US 9,025,161
US 9,115,975
US 9,140,537
US 9,146,093
US 9,200,892
US 9,746,348
US 10,066,974

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