Measurement Electronics
ZMI™ Series – Displacement Measuring Interferometers
ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
The ZMI Go! is a complete and compact measurement electronics solution for displacement measuring interferometers. Supports up to 4 measurement channels and provides easy interfacing with standard motion control systems at fast data rates. Ideal for semiconductor metrology and advanced packaging applications.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.
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BROCHURES &
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MANUALS
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| Model: | 501A | Go! | 2400 | 4004 | 4104(C) |
| Number of Axes/Board: | 2 | 3-4 | 1 or 2 | 4 | |
| Max. Units Synchronizable | na | 2 | 7 | 16 | |
| Board Type: | Enclosure | 6U VME | 6U VME64x | ||
| Minimum Optical Power: | 8.0 µW | 1.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
| Position Resolution: | 1.24 nm | 1.24 nm | 0.31 nm | 0.15 nm | |
| Max. Velocity: | ±0.475 m/s | ±2.55 m/s | ±2.1 m/s | ±2.55 m/s | |
| Accuracy at Max Velocity (σ): | 1.6 nm | 0.5 nm | 0.5 nm | 0.2 nm | |
| Cyclic Error Compensation: | No | Yes | |||
| Compatible Laser(s): | 7705 | 7702, 7714, and 7724 | |||
| Note: Specifications are for double-pass interferometers. | |||||
