ZMI Go!
ZMI Go!
The ZMI Go! measurement electronics provides a complete and compact electronic module for displacement measurement interferometer systems. It supports up to four measurement channels, provides laser power and communication, and connects with motion control devices.
The product features standard EtherCAT and Synchronous Serial Interface (SSI) data interfaces for easy integration with commercial stage servo controllers at up to 40 kHz update rates. Convenient 19-inch rack mounting and Ethernet based configuration make this an ideal solution for semiconductor metrology and advanced packaging applications.
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| Model: | 501A | Go! | 2400 | 4004 | 4104(C) |
| Number of Axes/Board: | 2 | 3-4 | 1 or 2 | 4 | |
| Max. Units Synchronizable | na | 2 | 7 | 16 | |
| Board Type: | Enclosure | 6U VME | 6U VME64x | ||
| Minimum Optical Power: | 8.0 µW | 1.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
| Position Resolution: | 1.24 nm | 1.24 nm | 0.31 nm | 0.15 nm | |
| Max. Velocity: | ±0.475 m/s | ±2.55 m/s | ±2.1 m/s | ±2.55 m/s | |
| Accuracy at Max Velocity (σ): | 1.6 nm | 0.5 nm | 0.5 nm | 0.2 nm | |
| Cyclic Error Compensation: | No | Yes | |||
| Compatible Laser(s): | 7705 | 7702, 7714, and 7724 | |||
| Note: Specifications are for double-pass interferometers. | |||||
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Title
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
A New Laser Measurement System for Precision Metrology
Advances in optical metrology
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
Displacement Measuring Interferometry (book chapter)
Displacement Measuring Interferometry Measurement Uncertainty
Displacement-Measuring Interferometers Provide Precise Metrology
Title
Document
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
Download Download
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Download